AOI/ INSPECTION MACHINE

STRATUS solutions are the outstanding choice for both in-line inspection and offline inspection of unpopulated structures. Our customers manufacture electrical components on multilayer hybrids, LTCC/HTCC, Wafers, Chrome masks and other screen or stencil printed, electroplated or sputtered technologies.

In-line inspection, where the structure is inspected directly after the manufacturing process, is the best way to ensure quality and increase yield with direct feedback to production machines stopping the production after consecutive defects. STRATUS offers 2D inspection as well as 2D metrol ogy and 3D metrology.

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GENERAL SPECIFICATION

Material size
up to 600x600mm

Thickness
0.001 ~ 20mm

Type
2D, 3D, Metrology

Resolution
down to +/- 0.2µm or 0.0002mm

Machines

Manually Loaded

Stratus Desktop

A flexible solution for customers to measure and inspect against CAD data their substrates. This is the minimal solution available, and is suitable for customers with small volume inspection requirements or R&D.

TECHNICAL DATA
Machine dimensions
Length x width x height 646 X 501 X 535mm
Weight 54Kg
Color RAL 9003
Machine dimensions
Power requirements 230 V AC; 110V AC; 50/60Hz; 1+N+Ground
Power consumption TBD
Full load current 2A
Motors Steppermotors
Operating Voltage 24 V; 12 V
Air supply NONE
Axle sideslip 0.1MM
Temperature 18.5°C +/- 8.5°C
Humidity 50% +/- 25%
Inspection parameters
Maximum MOTOR speed 600mm/sec
Camera 5 Megapixel Areascan; 16k Linescan/sec

Stratus Nano

For GaAs, SiC, SIN, … wafer inspection solution for highest resolution 100% inspection and measurements.

Also available with automatic loading and as extension for automatic Leica microscope installations.

TECHNICAL DATA
Machine dimensions
Length x width x height 646 X 501 X 535mm
Weight 54Kg
Color RAL 9003
Machine dimensions
Power requirements 230 V AC; 110V AC; 50/60Hz; 1+N+Ground
Power consumption TBD
Full load current 2A
Motors Steppermotors
Operating Voltage 24 V; 12 V
Air supply NONE
Axle sideslip 0.1MM
Temperature 18.5°C +/- 8.5°C
Humidity 50% +/- 25%
Inspection parameters
Maximum MOTOR speed 600mm/sec
Camera 5 Megapixel Areascan; 16k Linescan/sec

Stratus III ECO

The entry level AOI with manual loading automatic solution to inspection of most kinds of products.

Defect types range from excess paste, missing paste, smearing, narrowing, mouse bites, holes, via covering, sprayers, bleeding of paste, contamination, layer shifts, etc

TECHNICAL DATA
Machine dimensions
Length x width x height (Approx.) 1500 x 800 x 2500 mm
Weight (approx.) 750 kg
Color RAL 9003
Installation requirements
Power requirements 230 V AC; 120V AC; 50/60Hz; 1+N+Ground
Power consumption approx. 0.3 kW
Full load current approx. 4.8 A
Fuse protection 3 x 10 A
Operating voltage 24 V; 12 V; 5 V
Air supply requirement 6 bar
Air consumption approx. 40 l/min
Temperature 18.5°C +/- 8.5°C
Humidity 50% +/- 25%
Inspection parameters
Maximum MOTOR speed 500mm/sec
Camera 5 Megapixel Areascan; 16k Linescan
Resolution Maximum 2µm; Minimum 10µm
Maximum number of cameras 4 of one type
Illuminations (up to 3 in automatic switch) Multiple toplights (LEDs), backlight (LEDs)
Movement X, Y, Z, Theta
Accuracy; Repeatability +/- 2µm ; +/- 1µm
Substratre parameters
Maximum substrate size 12” / 300 mm
Maximum substrate height 1” / 2.5 mm

Stratus III

The Stratus III is our manually loaded automatic solution to inspection of most kinds of products.

Defect types range from excess paste, missing paste, smearing, narrowing, mouse bites, holes, via covering, sprayers, bleeding of paste, contamination, layer shifts, substrate shrinking, screen aging, etc

TECHNICAL DATA
Machine dimensions
Length x width x height (Approx.) 1500 x 800 x 2500 mm
Weight (approx.) 800 kg
Color RAL 9003
Installation requirements
Power requirements 230 V AC; 120V AC; 50/60Hz; 1+N+Ground
Power consumption approx. 0.3 kW
Full load current approx. 4.8 A
Fuse protection 3 x 10 A
Operating voltage 24 V; 12 V; 5 V
Air supply requirement 6 bar
Air consumption approx. 40 l/min
Temperature 18.5°C +/- 8.5°C
Humidity 50% +/- 25%
Inspection parameters
Maximum MOTOR speed 500mm/sec
Camera 5 Megapixel Areascan; 16k Linescan
Resolution Maximum 2µm; Minimum 10µm
Maximum number of cameras 2 of one type
Illuminations (up to 3 in automatic switch) Multiple toplights (LEDs), backlight (LEDs)
Movement X, Y, Z, Theta
Accuracy; Repeatability +/- 2µm ; +/- 1µm
Substratre parameters
Maximum substrate size 12” / 300 mm
Maximum substrate height 1” / 15 mm

Offline Flex

The high precision AOI with manual loading automatic solution to inspection of most kinds of products combining high accuracy measurement for both 2D and 3D.

Defect types range from excess paste, missing paste, smearing, narrowing, mouse bites, holes, via covering, sprayers, bleeding of paste, contamination, layer shifts, et

TECHNICAL DATA
Machine dimensions
Length x width x height 1687 x 1600 x 2128 mm
Weight 1000 kg
Color RAL 9003
Installation requirements
Power requirements 220 V AC; 110V AC; 50/60Hz; 1+N+Ground
Power consumption 0.5 kW
Full load current 4.8 A @ 110V; 2.4 A @ 220V
Fuse protection 3 x 10 A
Operating Voltage 24 V; 12 V; 5 V
Air supply 6 bar
Air consumption 40 l/min
Temperature 18.5°C +/- 8.5°C
Humidity 50% +/- 25%
Inspection parameters
Maximum MOTOR speed 600mm/sec
Camera 5 Megapixel Areascan; 16k Linescan/sec
Resolution Maximum 1.5µm; Minimum 10µm
Maximum number of cameras 4 of one type
Lights Multiple toplights (LEDs), backlight (LEDs)
Movement X, Y, Z, Theta
Accuracy; Repeatability +/- 2µm ; +/- 0.8µm
Measurement Accuracy 1µm + 5L/1000 (L in mm)
Circuit parameters
Maximum size 9” / 225 mm
Maximum circuit height 0.8” / 20 mm

Stratus Laser LMM Metrology

The high precision AOI with manual loading automatic solution focused on wafer inspection and metrology and inspection of TSV and laser drilled structures.

TECHNICAL DATA
Machine dimensions
Length x width x height 870 x 780 x 1585 mm
Weight 1000 kg
Color RAL 9003
Installation requirements
Power requirements 220 V AC; 110V AC; 50/60Hz; 1+N+Ground
Power consumption 0.5 kW
Full load current 4.8 A @ 110V; 2.4 A @ 220V
Fuse protection 1 x 10 A
Operating voltage 24 V; 12 V; 5 V
Air supply 6 bar
Air consumption 40 l/min
Temperature 18.5°C +/- 8.5°C
Humidity 50% +/- 25%
Inspection parameters
Maximum MOTOR speed 600mm/sec
Camera 16k Linescan
Resolution Maximum 6µm; Minimum 10µm
Maximum number of cameras 1
Lights Multiple toplights(LEDs)
Movemen Y
Accuracy; Repeatability +/- 2µm ; +/- 0.8µm
Measurement Accuracy 1µm + 5L/1000 (L in mm)
Circuit parameters
Maximum size 7.6” / 192 mm
Maximum circuit height 0.8” / 20 mm

Glass Inspect

The high precision AOI with manual loading automatic solution focused on Glass large substrates and glass wafer inspection and metrology.

TECHNICAL DATA
Machine dimensions
Length x width x height 1600 x 1600 x 200 mm
Weight 1400 kg
Color RAL 9003
Installation requirements
Power requirements 220 V AC; 110V AC; 50/60Hz; 1+N+Ground
Power consumption 0.5 kW
Full load current 4.8 A @ 110V; 2.4 A @ 220V
Fuse protection 3 x 10 A
Operating Voltage 24 V; 12 V; 5 V
Air supply 6 bar
Air consumption 40 l/min
Temperature 18.5°C +/- 8.5°C
Humidity 50% +/- 25%
Inspection parameters
Maximum MOTOR speed 600mm/sec
Camera 5 Megapixel Areascan
Resolution Maximum 1µm; Minimum 10µm
Maximum number of cameras 2 of one type
Lights Multiple toplights (LEDs)
Movement X, Y, Z
Accuracy; Repeatability +/- 2µm ; +/- 0.8µm
Measurement Accurac 1µm + 5L/1000 (L in mm)
Maximum size 20” / 500mm
Maximum circuit height 0.8” / 20mm

Wafer Inspect

The high precision AOI with manual loading automatic solution focused on large wafer substrates and metrology.

TECHNICAL DATA
Machine dimensions
Length x width x height 646 X 501 X 535mm
Weight 54Kg
Color RAL 9003
Machine dimensions
Power requirements 230 V AC; 110V AC; 50/60Hz; 1+N+Ground
Power consumption TBD
Full load current 2A
Motors Steppermotors
Operating Voltage 24 V; 12 V
Air supply NONE
Axle sideslip 0.1MM
Temperature 18.5°C +/- 8.5°C
Humidity 50% +/- 25%
Inspection parameters
Maximum MOTOR speed 600mm/sec
Camera 5 Megapixel Areascan; 16k Linescan/sec

Reticle

The high precision AOI with manual loading automatic solution focused on reticle inspection and metrology.

TECHNICAL DATA
Machine dimensions
Length x width x height 1800 x 1800 x 1600 mm
Weight 1500 kg
Color RAL 9003
Installation requirements
Power requirements 220 V AC; 110V AC; 50/60Hz; 1+N+Ground
Power consumption 0.5 kW
Full load current 4.8 A @ 110V; 2.4 A @ 220V
Fuse protection 3 x 10 A
Operating Voltage 24 V; 12 V; 5 V
Air supply 6 bar
Air consumption 70 l/min
Temperature 18.5°C +/- 8.5°C
Humidity 50% +/- 25%
Inspection parameters
Maximum inspection speed 120mm²/sec
Camera 5-10 Megapixel Areascan
Resolution Maximum 300 nm; Minimum 1 µm
Maximum number of cameras 2; Overview and Inspection camera
Lights Multiple toplights (LEDs); Backlight for Inspection
Movement X, Y, Z; Complete Air bearing with ironcoreless
Accuracy; Repeatability +/- 1µm ; +/- 0.25µm
Specialty Defect report output file; On the fly program generation; Die to Database, QMS integration;
Circuit parameters
Mask size 5”; 6”, 7”; 8”; 9”; 12”; 14” (Ask for other sizes)
Maximum circuit height 0.8” / 20 mm
Material support for Quartz Glas; Sodalime; Boroflat
Surface Material High-reflective Chrome; Anti-reflective Chrome
Verfication procedure Verimask; Compugraphics Quali-Mask#1020

MVI Metrology

This is a specialized AOI for the 100% measurement of via holes on substrates such as HTCC, MLCI, LTCC, …

TECHNICAL DATA
Machine dimensions
Length x width x height 870 x 780 x 1585 mm
Weight 1000 Kg
Color RAL 9003
Installation requirements
Power requirements 220 V AC; 110V AC; 50/60Hz; 1+N+Ground
Power consumption 0.5 kW
Full load current 4.8 A @ 110V; 2.4 A @ 220V
Fuse protection 1 x 10 A
Operating Voltage 24 V; 12 V; 5 V
Air supply 6 bar
Air consumption 40 l/min
Temperature 18.5°C +/- 8.5°C
Humidity 50% +/- 25%
Inspection parameters
Maximum MOTOR speed 600mm/sec
Camera 16k Linescan
Resolution Maximum 6µm; Minimum 10µm
Maximum number of cameras 1
Lights Multiple toplights (LEDs)
Movement Y
Accuracy; Repeatability +/- 2µm ; +/- 0.8µm
Measurement Accuracy 1µm + 5L/1000 (L in mm)
Circuit parameters
Maximum size 7.6” / 192mm
Maximum circuit height 0.8” / 20mm

Automatically loaded

Stratus III inline

Our Stratus III Inline solution is our automatic solution to inspect rigid boards (Ceramic, PCB, etc.) in an automated conveyor based solution. This system offers maximum speed and toplight flexibility with great cost efficiency. Substrates up to a size of 10″ x 10″ can be inspected for excess paste, missing paste, smearing, narrowing, mouse bites, holes, via covering, sprayers, bleeding of paste, contamination, print shifts, substrate shrinking, screen aging, etc, and it differentiates between random and serial defects.

TECHNICAL DATA
Machine dimensions
Length x width x height 1490 x 1000 x 2781 mm
Weight 850 kg
Color RAL 9003
Installation requirements
Installation requirements 230 V AC; 110V AC; 50/60Hz; 1+N+Ground
Power consumption 1 kW
Full load current 5.8 A @ 110V
Fuse protection 3 x 10 A
Operating voltage 24 V; 12 V; 5 V
Air supply 6 bar
Air consumption 40 l/min
Temperature 18.5°C +/- 8.5°C
Humidity 50% +/- 25%
Inspection parameters
Maximum inspection speed 600mm/sec
Camera 5 Megapixel Areascan; 16k Linescan/sec
Resolution Maximum 2µm; Minimum 10µm
Maximum number of cameras 4 of one type
Lights Multiple toplights (LEDs), backlight (LEDs)
Movement X, Y, Z, Theta
Accuracy; Repeatability +/- 2µm ; +/- 0.8µm
Automation possibilities Left in/out; Right in/out; Left in/ Right out
Maximum weight for part 0.5 kg
Placement accuracy +/- 1 mm
Conveyor height 950mm +/- 50mm SMEMA standard
Magazine handlers or further inline equipment must be agreed upon contract signature
Inspection parameters
Maximum size; Minimum Size 12” / 300 mm; 2” / 50 mm
Maximum circuit height 0.8” / 20 mm

Inline Hybrid

Our Inline hybrid solution is our automatic solution to inspect ceramic boards up to 6″ x 6″ in a super high speed solution. We can use backlight and toplight for the inspection and can find defects like excess paste, missing paste, smearing, narrowing, mouse bites, holes, via covering, sprayers, bleeding of paste, contamination, print shifts, substrate shrinking, screen aging, etc, and it differentiates between random and serial defects.

TECHNICAL DATA
Machine dimensions
Length x width x height 1445 mm x 800 mm x 1788 mm
Weight 600 kg
Color RAL 9003
Welded Steel frame
Granite base
Flexible Monitor arm
Connection
Voltage 110V AC to 240V AC
Current 4.8 Amps to 2.2 Amps
Frequenzy 50 to 60 Hertz
Network Ethernet RJ45
Air 6 bar
Air consumption 40l / min
Inspection parameters
Camera Areascan, Linescan and 3D
Resolution 1µm to 15µm
Lens Telecentric, Bicentric or
Operation Conditions
Operating Temperature 18.5°C +/- 8.5°C
Operating Humidity 50% +/- 25%
Power Consumption 0.5kW average

Inline Flex

Our Inline Flex solution is our automatic solution for a wide array of applications. The system is design to handle foils on carriers, foils in boxes or rigid circuit boards. The inspection would inspect substrates for excess paste, missing paste, smearing, narrowing, mouse bites, holes, via covering, sprayers, bleeding of paste, contamination, print shifts, substrate shrinking, screen aging, etc, and it differentiates between random and serial defects.

TECHNICAL DATA
Machine dimensions
Length x width x height 1687 x 1600 x 2128 mm
Weight 1000 kg
Color RAL 9003
Installation requirements
Power requirements 220 V AC; 110V AC; 50/60Hz; 1+N+Ground
Power consumption 0.5 kW
Full load current 4.8 A @ 110V; 2.4 A @ 220V
Fuse protection 3 x 10 A
Operating voltage 24 V; 12 V; 5 V
Air supply 6 bar
Axle consumption 40 l/min
Temperature 18.5°C +/- 8.5°C
Humidity 50% +/- 25%
Inspection parameters
Maximum inspection speed 600mm/sec
Camera 5 Megapixel Areascan; 16k Linescan
Resolution Maximum 1.5µm; Minimum 10µm
Maximum number of cameras 4 of one type
Lights Multiple toplights (LEDs), backlight (LEDs)
Movement X, Y, Z, Theta
Accuracy; Repeatability +/- 2µm ; +/- 0.8µm
Measurement Accuracy 1µm + 5L/1000 (L in mm)
Circuit parameters
Maximum size 9” / 225mm
Maximum circuit height 0.8” / 20mm

Stratus AW

Powered by STRATUS SPIN Technology, the 3D/2D metrology and inspection system provides the best combination of high speed, high resolution and high accuracy wafer-level and advanced packaging applications to improve yields and processes.

The setup of the inspection is market leading and with resolutions down below 1-micron in X/Y resolution 0.2~3µm and a thickness resolution of 1-micron). This combination enables metrology grade accuracy with superior 100% 3D and 2D measurement performance for features as small as 3-micron and a 100% CAD based inspection.

TECHNICAL DATA

Machine dimensionsInstallation requirementsInspection parametersCircuit parameters

Length x width x height
Weight
Color
Power requirements
Power consumption
Full load current
Fuse protection
Operating voltage
Air supply
Axle consumption
Temperature
Humidity
Maximum inspection speed
Camera
Resolution
Maximum number of cameras
Lights
Movement
Accuracy; Repeatability
Measurement Accuracy
Maximum size
Maximum circuit height

Inline MVI Metrology

Our Inline MVI Metrology solution is our automatic solution to inspect and measure substrates. The systems main purpose is automated dimensional and positional measurement of general features and interposers on foils, boards and other materials. During a automated measurement inspection the system can also inspect for surface defects.

TECHNICAL DATA
Machine dimensions
Length x width x height 870 x 780 x 1585 mm
Weight 1000 kg
Color RAL 9003
Installation requirements
Power requirements 220 V AC; 110V AC; 50/60Hz; 1+N+Ground
Power consumption 0.5 kW
Full load current 4.8 A @ 110V; 2.4 A @ 220V
Fuse protection 1 x 10 A
Operating Voltage 24 V; 12 V; 5 V
Air supply 6 bar
Air consumption 40 l/min
Temperature 18.5°C +/- 8.5°C
Humidity 50% +/- 25%
Inspection parameters
Maximum inspection speed 600mm/sec
Camera 16k Linescan
Resolution Maximum 6µm; Minimum 10µm
Maximum number of cameras 1
Lights Multiple toplights (LEDs)
Movement Y
Accuracy; Repeatability +/- 2µm ; +/- 0.8µm
Measurement Accuracy 1µm + 5L/1000 (L in mm)
Maximum size 7.6” / 192 mm
Maximum circuit height 0.8” / 20 mm

Customized Production lines